Scalloped tubular electric via
AssigneeSTMicroelectronics (Crolles 2) SAS
InventorsHamed Chaabouni, Lionel Cadix
Life of this patent
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Abstract
A via connecting the front surface of a substrate to its rear surface and having, in cross-section in a plane parallel to the surfaces, the shape of a scalloped ring.
Claims8
An electrical connection connecting a front surface of a substrate to a single contact pad arranged on the rear surface side of the substrate, said via comprising a plurality of elementary vias each having the shape of a solid cylindrical rod, the elementary vias being disposed in cross-section in a plane parallel to the surfaces, according to a ring wherein, in cross-section in a plane parallel to the surfaces, the elementary vias are contacting each other.
A method for forming an electrical connection via connecting the front surface of a substrate to a single contact pad arranged on the rear surface side of the substrate, comprising the steps of:
- boring a plurality of holes thoroughly crossing the substrate and connecting the front surface to the pad, said holes being arranged, in top view, in a ring;
- and filling said holes with a conductive material, wherein, in cross-section in a plane parallel to the surfaces, the holes with the conductive material are contacting each other.
Dependencies are inferred from the claim text.