Photodiode array for image pickup device
AssigneeSumitomo Electric Industries, Ltd.
InventorsYouichi Nagai, Yasuhiro Iguchi
Life of this patent
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Abstract
A photodiode array includes a substrate of a common read-out control circuit; and a plurality of photodiodes arrayed on the substrate and each including an absorption layer, and a pair of a first conductive-side electrode and a second conductive-side electrode. In this photodiode array, each of the photodiodes is isolated from adjacent photodiodes, the first conductive-side electrodes are provided on first conductivity-type regions and electrically connected in common across all the photodiodes, and the second conductive-side electrodes are provided on second conductivity-type regions and individually electrically connected to read-out electrodes of the read-out control circuit.
Claims1
A photodiode array comprising:
- a substrate of a common read-out control circuit;
- and
- a plurality of photodiodes arrayed on the substrate and each including an absorption layer, and a pair of a first conductive-side electrode and a second conductive-side electrode,
- wherein each of the photodiodes is separated from adjacent photodiodes,
- the first conductive-side electrodes are provided on first conductivity-type regions and electrically connected in common across all the photodiodes,
- the second conductive-side electrodes are provided on second conductivity-type regions and individually electrically connected to read-out electrodes of the read-out control circuit,
- the photodiodes are semiconductor multilayer structures formed on a semiconductor substrate,
- the semiconductor substrate has been removed or the semiconductor substrate is included in the semiconductor multilayer structure,
- each of the second conductivity-type regions is formed by selective diffusion for corresponding photodiode so as to face the absorption layer,
- the second conductive-side electrodes are provided on the corresponding second conductivity-type regions,
- the second conductive-side electrodes are connected to the corresponding read-out electrodes on the substrate of the read-out control circuit, and
- a surface of the semiconductor multilayer structures opposite a surface on which the second conductive-side electrodes are disposed functions as a light-incident surface.
Dependencies are inferred from the claim text.