Backside illuminated image sensor
AssigneeUnited Microelectronics Corp.
InventorsChia-Huei Lin, Kuo-Yuh Yang
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Abstract
A backside illuminated (BSI) image sensor including a substrate, a plurality of photosensitive regions, a back-end-of-line (BEOL), a pad, a color filter array, a plurality of micro-lenses and a protection layer is provided. The substrate has a first surface and a second surface. The substrate has a pad opening therein through the first surface and the second surface. The photosensitive regions are disposed in the substrate. The BEOL is disposed on the first surface of the substrate. The pad is disposed in the BEOL and exposed by the pad opening. The color filter array is disposed on the second surface of the substrate. The micro-lenses are disposed on the color filter array. The protection layer at least covers the top corner and the sidewall of the pad opening.
Claims19
A backside illuminated (BSI) image sensor, comprising:
- a substrate, having a first surface and a second surface, wherein the substrate has a pad opening therein through the first surface and the second surface;
- a plurality of photosensitive regions, disposed in the substrate;
- a back-end-of-line (BEOL), disposed on the first surface of the substrate;
- a pad, disposed in the BEOL and exposed by the pad opening;
- a color filter array, disposed on the second surface of the substrate;
- a plurality of micro-lenses, disposed on the color filter array;
- and
- a protection layer, at least covering a top corner and a sidewall of the pad opening and further extending between the substrate and the color filter array.
Dependencies are inferred from the claim text.