Light-emitting device having a roughened surface with different topographies
AssigneeEpistar Corporation
InventorsChiu-Lin Yao, To-Cheng Hsu
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Abstract
This invention provides an optoelectronic semiconductor device having a rough surface and the manufacturing method thereof. The optoelectronic semiconductor device comprises a semiconductor stack having a rough surface and an electrode layer overlaying the semiconductor stack. The rough surface comprises a first region having a first topography and a second region having a second topography. The method comprises the steps of forming a semiconductor stack on a substrate, forming an electrode layer on the semiconductor stack, thermal treating the semiconductor stack, and wet etching the surface of the semiconductor stack to form a rough surface.
Claims10
An optoelectronic semiconductor device comprising:
- a substrate;
- a semiconductor stack disposed on the substrate and having a rough surface;
- an electrode layer between the semiconductor stack and the substrate;
- a conductive connecting layer between the semiconductor stack and the substrate;
- and
- a first electrode structure overlaying the semiconductor stack;
- wherein the rough surface comprises a first region having a first rough topography and a second region having a second rough topography different from the first rough topography.
Dependencies are inferred from the claim text.