Surface-emitting laser element, fabrication method thereof, surface-emitting laser array, and fabrication method thereof

A fabrication method of a surface-emitting laser element, Comprising:

• preparing a conductive GaN multiple-region substrate including a conductive GaN substrate with a high dislocation density high conductance region having a high dislocation density and carrier concentration, a low dislocation density high conductance region having a dislocation density lower than the dislocation density of said high dislocation density high conductance region, and a low dislocation density low conductance region having a dislocation density and carrier concentration lower than the dislocation density and carrier concentration of said high dislocation density high conductance region,
• forming a group III-V compound semiconductor layer stack including an emission layer on one main surface of said conductive GaN multiple-region substrate, and
• forming a semiconductor layer side electrode on an uppermost layer of said group III-V compound semiconductor layer stack, and a substrate side electrode on an other main surface of said conductive GaN multiple-region substrate,
• wherein said group III-V compound semiconductor layer stack, said semiconductor layer side electrode, and said substrate side electrode are formed such that an emission region into which carriers flow in said emission layer is limited to be located above and within a span of said low dislocation density high conductance region, said high dislocation density high conductance region is a region having a dislocation density of at least 1×106 cm−2 and a carrier concentration of at least 1×1018 cm−3, said low dislocation density high conductance region is a region having a dislocation density less than 1×106 cm−2 and a carrier concentration of at least 1×1018 cm−3, and said low dislocation density low conductance region is a region having a dislocation density less than 1×106 cm−2 and a carrier concentration less 1×1018 cm−3.