Back to results
US 8,274,075 B2Granted
Crosslinked polymeric dielectric materials and electronic devices incorporating same
AssigneeNorthwestern University
InventorsTobin J. Marks, Antonio Facchetti, Zhiming Wang, Hyuk-Jin Choi
Life of this patent
Estimating the term…
Abstract
Solution-processable dielectric materials are provided, along with precursor compositions and processes for preparing the same. Composites and electronic devices including the dielectric materials also are provided.
Claims20
An electronic device comprising a semiconductor component and a dielectric material, wherein the dielectric material comprises a crosslinked polymeric material comprising a thermally cured product of a precursor composition, the precursor composition comprising:
- (1) a polymeric component and a thermally curable crosslinker, (2) a thermally curable polymeric crosslinker, or both (1) and (2), wherein:
- the thermally curable crosslinker of (1) has the formula:
- (X)3-m(Y)mSi—Z—Si(Y)m(X)3-m, and
- the thermally curable polymeric crosslinker of (2) comprises a pendant group comprising a crosslinking moiety having the formula:
- -Q-Si(Y)m(X)3-m,
- wherein:
- Q, at each occurrence, independently is selected from the group consisting of -L-, —O—,—O-L, -L-O—, —NR4—, —NR4-L-, -L-NR4—, and a covalent bond;
- X, at each occurrence, independently is selected from the group consisting of a halogen, —NR1R2, —OR3, and —OC(O)R3;
- Y, at each occurrence, independently is selected from the group consisting of H, a C1-6 alkyl group, and a C1-6 haloalkyl group;
- Z is Q-W-Q, provided that Q and W do not combine to form a moiety selected from the group consisting of —O—, a divalent C1-20 alkyl group, and a covalent bond;
- and
- m, at each occurrence, independently is 0, 1, or 2;
- wherein:
- L, at each occurrence, independently is a divalent C1-10 alkyl group or a divalent C1-10 haloalkyl group, each of which optionally is substituted with 1-4 R4 groups;
- W is selected from the group consisting of —SiXX—, —SiXY—, —SiYY—, —SiXX—O—, —O—SiXX—, —SiXY—O—, —O—SiXY—, —SiYY—O—, —O—SiYY—, —O—{[CR42)t—O]p—[CR52)t-O]q}—, a divalent C6-14 aryl group, a divalent 5-14 membered heteroaryl group, and a covalent bond, wherein each of the divalent C6-14 aryl group and the divalent 5-14 membered heteroaryl group is optionally substituted with 1-4 R4 groups;
- R1 and R2 independently are selected from the group consisting of H, a C1-6 alkyl group, a C6-14 aryl group, a 5-14 membered heteroaryl group, a —C1-6alkyl-C6-14aryl group, and a —C1-6 alkyl-5-14 membered heteroaryl group;
- R3 is selected from the group consisting of H, a C1-6 haloalkyl group, a C2-6 alkenyl group, a C2-6 alkynyl group, a C6-14 aryl group, a 5-14 membered heteroaryl group, a —C1-6 alkyl group, C6-14 aryl group, and a —C1-6 alkyl-5,14 membered heteroaryl group;
- R4 and R5, at each occurrence, independently are selected from the group consisting of H, a halogen, a C1-6 alkyl group, a C1-6 haloalkyl group, a C6-14 aryl group, a 5-14 membered heteroaryl group, a —C1-6 alkyl —C6-14 aryl group, a —C1-6 alkyl-5-14 membered heteroaryl group, and -Q-Si(Y)m(X)3-m;
- p is 0, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18 or 19;
- and
- q is 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19 or 20, provided that p+q≦20;
- and
- t, at each occurrence, independently is 1, 2, 3, 4, 5, or 6.
20 more elements
Dependencies are inferred from the claim text.