MOS-FET having a channel connection, and method for the production of a MOS-FET having a channel connection
Assigneeaustriamicrosystems AG
InventorGeorg Röhrer
Life of this patent
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Assigneeaustriamicrosystems AG
InventorGeorg Röhrer
Estimating the term…
A MOSFET comprising a substrate of a semiconductor material; source/drain regions, which are arranged at a distance from each other at a surface of the substrate; a gate electrode arranged above an area of the surface of the substrate between the source/drain regions, the gate electrode being electrically insulated from the semiconductor material; at least one recess in the gate electrode, a through-contact arranged in the recess of the gate electrode, the through-contact being electrically insulated from the gate electrode; a terminal contact on the semiconductor material; and a terminal conductor arranged on the side of the gate electrode that faces away from the substrate, wherein the through-contact electrically connects the terminal contact to the terminal conductor.
A MOSFET comprising:
A method for producing a MOSFET, comprising the steps of:
Dependencies are inferred from the claim text.