Method of manufacturing a light emitting device and thin film forming apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsHirokazu Yamagata, Yoshimi Adachi, Noriko Shibata
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Abstract
A method of manufacturing a light emitting device is provided in which satisfactory image display can be performed by the investigation and repair of short circuits in defect portions of light emitting elements. A backward direction electric current flows in the defect portions if a reverse bias voltage is applied to the light emitting elements having the defect portions. Emission of light which occurred from the backward direction electric current flow is measured by using an emission microscope, specifying the position of the defect portions, and short circuit locations can be repaired by irradiating a laser to the defect portions, turning them into insulators.
Claims20
An apparatus for repairing a light emitting element comprising:
- a reverse bias applying apparatus configured to apply a reverse bias to the light emitting element;
- a light emission detecting apparatus configured to detect light emission from a defect portion of the light emitting element;
- and
- a laser configured to irradiate the defect portion with laser light,
- wherein the defect portion is made into an insulator by irradiation of the laser light.
An apparatus for repairing a light emitting element comprising:
- a condenser lens;
- a reverse bias applying apparatus configured to apply a reverse bias to the light emitting element;
- a light emission detecting apparatus configured to detect light emission from a defect portion of the light emitting element through the condenser lens;
- and
- a laser configured to irradiate the defect portion with laser light through the condenser lens,
- wherein the defect portion is made into an insulator by irradiation of the laser light.
An apparatus for repairing a light emitting element comprising:
- a stage on which the light emitting element is provided;
- a reverse bias applying apparatus configured to apply a reverse bias to the light emitting element;
- a light emission detecting apparatus configured to detect light emission from a defect portion of the light emitting element;
- and
- a positioning mechanism configured to move the stage;
- and
- a laser configured to irradiate the defect portion with laser light,
- wherein the defect portion is made into an insulator by irradiation of the laser light.
An apparatus for repairing a light emitting element comprising:
- a condenser lens;
- a stage on which the light emitting element is provided;
- a reverse bias applying apparatus configured to apply a reverse bias to the light emitting element;
- a light emission detecting apparatus configured to detect light emission from a defect portion of the light emitting element through the condenser lens;
- a positioning mechanism configured to move the stage;
- and
- a laser configured to irradiate the defect portion with laser light through the condenser lens,
- wherein the defect portion is made into an insulator by irradiation of the laser light.
An apparatus according to claim. 1, wherein the reverse bias applying apparatus applies a reverse bias within a range of 1 to 15 V to the light emitting element.
Dependencies are inferred from the claim text.