Radiation-sensitive resin composition and compound

A compound shown by a formula (1),

• wherein
• R1 represents a divalent hydrocarbon group having 1 to 20 carbon atoms and R2 represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, or
• R1 and R2 are such that R1 and R2 together with a nitrogen atom form a heterocyclic structure having 4 to 20 carbon atoms if R1 and R2 bond with each other via the nitrogen atom,
• wherein R3 represents a monovalent acid-dissociable group, n is an integer from 1 to 6,
• wherein
• each of R4A, R4B, and R4C represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
• R4A represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and R4B and R4C are such that R4B and R4C together with a carbon atom form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms if R4B and R4C bond with each other via the carbon atom, and
• wherein
• R3 in the formula (1) comprises a group shown by formula (I-1),
• wherein
• X represents an oxygen atom or a sulfur atom, each of R5 and R6 represents one of a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, and an alkoxy group having 1 to 20 carbon atoms, and R7 represents one of an alkyl group having 1 to 20 carbon atoms, an alkoxyalkyl group having 2 to 20 carbon atoms, an alicyclic hydrocarbon hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 18 carbon atoms, and an aralkyl group having 7 to 19 carbon atoms.

A radiation-sensitive resin composition comprising:

• (A) a compound shown by a formula (1);
• (B) a resin protected by an acid-dissociable group and being insoluble or scarcely soluble in alkali, the resin becoming alkali-soluble upon dissociation of the acid-dissociable group;
• and
• (C) a photoacid generator,
• wherein
• R1 represents a hydrocarbon group having 1 to 20 carbon atoms and R2 represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, or
• R1 and R2 are such that R1 and R2 together with a nitrogen atom form a heterocyclic structure having 4 to 20 carbon atoms if R1 and R2 bond with each other via the nitrogen atom,
• wherein R3 represents a monovalent acid-dissociable group, n is an integer from 1 to 6,
• wherein
• each of R4A, R4B, and R4C represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or
• R4A represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and R4B and R4C are such that R4B and R4C together with a carbon atom form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms if R4B and R4C bond with each other via the carbon atom,
• wherein
• R3 in the formula (1) comprises a group shown by formula (I-1),
• wherein
• X represents an oxygen atom or a sulfur atom, each of R5 and R6 represents one of a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, and an alkoxy group having 1 to 20 carbon atoms, and R7 represents one of an alkyl group having 1 to 20 carbon atoms, an alkoxyalkyl group having 2 to 20 carbon atoms, an alicyclic hydrocarbon hydrocarbon group having 3 to 20 carbon atoms, an aryl group having 6 to 18 carbon atoms, and an aralkyl group having 7 to 19 carbon atoms, and
• wherein
• R5 and R7 bond to form a heterocyclic structure having 3 to 20 carbon atoms together with the carbon atom that is bonded to R5 and R7.