Hardmask composition and associated methods

A method of forming a hardmask composition having a solvent, an organosilicon copolymer, and one or more crosslinking catalyst, the method comprising:

• preparing the organosilicon copolymer by copolymerizing about 5 to about 90 parts by weight of a first monomer represented by Formula 2, about 5 to about 90 parts by weight of a second monomer represented by Formula 3, and greater than 0 parts by weight and less than about 90 parts by weight of a third monomer containing a chromophore group X and represented by Formula 4:
• [HO]3Si—R3 (2)
• [HO]3Si—Y—Si[OH]3 (3)
• [HO]3Si—X (4)
• wherein the parts by weight of the first, second, and third monomers are based on a combined weight of the first, second and third monomers,
• wherein in Formula 2, R3 is a C1-C12 alkyl group, and
• wherein in Formula 3, Y is a linking group including:
• a substituted or unsubstituted, linear or branched C1-C20 alkyl group,
• a C1-C20 group containing a chain that includes an aromatic ring, a heterocyclic ring, a urea group or an isocyanurate group, or
• a C2-C20 group containing one or more multiple bonds, and
• wherein X is a C6-C30 group containing at least one substituted or unsubstituted aromatic ring;
• and
• combining the solvent with the organosilicon copolymer and about 0.0001 parts by weight to about 0.01 parts by weight, based on 100 parts by weight of the organosilicon copolymer, of the one or more crosslinking catalyst, wherein the one or more crosslinking catalyst includes pyridinium p-toluenesulfonate, amidosulfobetain-16, (−)-camphor-10-sulfonic acid ammonium salt, ammonium formate, triethylammonium formate, trimethylammonium formate, tetramethylammonium formate, pyridinium formate, tetrabutylammonium formate, tetramethylammonium nitrate, or tetrabutylammonium nitrate.