Methods of forming metal oxide nanostructures, and nanostructures thereof
AssigneeInternational Business Machines Corporation
InventorsHo-Cheol Kim, Robert D. Miller, Oun Ho Park
Life of this patent
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Abstract
A method of forming a metal oxide nanostructure comprises disposing a chelated oligomeric metal oxide precursor on a solvent-soluble template to form a first structure comprising a deformable chelated oligomeric metal oxide precursor layer; setting the deformable chelated oligomeric metal oxide precursor layer to form a second structure comprising a set metal oxide precursor layer; dissolving the solvent-soluble template with a solvent to form a third structure comprising the set metal oxide precursor layer; and thermally treating the third structure to form the metal oxide nanostructure.
Claims17
A method of forming a metal oxide nanostructure, comprising:
- disposing a chelated oligomeric metal oxide precursor on a solvent-soluble template to form a first structure comprising a deformable chelated oligomeric metal oxide precursor layer;
- setting the deformable chelated oligomeric metal oxide precursor layer to form a second structure comprising a set metal oxide precursor layer;
- dissolving the solvent-soluble template with a solvent to form a third structure comprising the set metal oxide precursor layer;
- and
- thermally treating the third structure to form the metal oxide nanostructure.
A method of forming a metal oxide nanostructure, comprising:
- disposing a chelated oligomeric metal oxide precursor on a solvent-soluble template to form a first structure comprising a chelated oligomeric metal oxide precursor layer having an exposed surface;
- bonding a substrate to the exposed surface of the chelated oligomeric metal oxide precursor layer to form a second structure comprising a chelated oligomeric metal oxide precursor layer;
- setting the chelated oligomeric metal oxide precursor layer of the second structure to form a third structure comprising a set metal oxide precursor layer;
- dissolving the solvent-soluble template with a solvent to form a fourth structure comprising the set metal oxide precursor layer;
- and
- thermally treating the fourth structure to form a fifth structure comprising a metal oxide nanostructure bonded to the substrate.
Dependencies are inferred from the claim text.