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US 8,273,318 B2Granted
Surface modifying carbon nanotube material, manufacturing method therefor, electronic component and electronic device
AssigneeFujitsu Semiconductor Limited
InventorKoji Asano
Life of this patent
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Abstract
A carbon nanotube material is exposed to ultraviolet rays, and a silicon-containing compound capable of modifying the surface of the carbon nanotube material in combination with the ultraviolet rays is supplied to thereby modify the surface of the carbon nanotube material.
Claims13
A method for manufacturing a surface modified carbon nanotube material, the method comprising a combination of exposing the carbon nanotube material to ultraviolet rays and supplying a silicon-containing compound to the carbon nanotube material,
- wherein the ultraviolet rays include only a wavelength component in the range of 10 to 200 nms, and does not include a wavelength component in the range longer than 200 nms.
Dependencies are inferred from the claim text.