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US 8,273,177 B2Granted
Titanium-doped indium oxide films
AssigneeMicron Technology, Inc.
InventorsKie Y. Ahn, Leonard Forbes
Life of this patent
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Abstract
An apparatus and methods of forming the apparatus include a film of transparent conductive titanium-doped indium oxide for use in a variety of configurations and systems. The film of transparent conductive titanium-doped indium oxide may be structured as one or more monolayers. The film of transparent conductive titanium-doped indium oxide may be formed using atomic layer deposition.
Claims30
An apparatus comprising:
- a substrate;
- and
- titanium-doped indium oxide disposed on the substrate, the titanium-doped indium oxide being a transparent conductive oxide, the titanium-doped indium oxide structured as a layered arrangement of monolayers, wherein the titanium of the titanium-doped indium oxide has a graded titanium doping profile.
An apparatus comprising:
- a flat panel display including:
- a substrate;
- and
- titanium-doped indium oxide disposed on the substrate, the titanium-doped indium oxide being a transparent conductive oxide, the titanium-doped indium oxide structured as a layered arrangement of monolayers, wherein the titanium of the titanium-doped indium oxide has a graded titanium doping profile.
1 more element
An apparatus comprising:
- a smart window including:
- a glass substrate;
- and
- titanium-doped indium oxide disposed on the glass substrate, the titanium-doped indium oxide being a transparent conductive oxide, the titanium-doped indium oxide structured as a layered arrangement of monolayers, wherein the titanium of the titanium-doped indium oxide has a graded titanium doping profile.
1 more element
An apparatus comprising:
- a semiconductor-based light source;
- and
- a transparent conductive oxide coupled to the semiconductor-based light source, the transparent conductive oxide including titanium-doped indium oxide structured as a layered arrangement of monolayers, wherein the titanium of the titanium-doped indium oxide has a graded titanium doping profile.
An apparatus comprising:
- a structure including a region to propagate electromagnetic radiation;
- and
- a transparent conductive oxide integrated with the structure to affect propagation of the electromagnetic radiation, the transparent conductive oxide including titanium-doped indium oxide structured as a layered arrangement of monolayers, wherein the titanium of the titanium-doped indium oxide has a graded titanium doping profile.
Dependencies are inferred from the claim text.