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US 8,269,210 B2Granted
Cathode assembly containing an ultraviolet light-blocking dielectric layer
AssigneeE. I. Du Pont de Nemours and Company
InventorsLap-Tak Andrew Cheng, Adam Fennimore
Life of this patent
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Abstract
A field emission cathode assembly that has a UV-blocking, insulating dielectric layer (3.4).
Claims12
A cathode assembly apparatus comprising:
- a) a cathode electrode disposed on a substrate;
- b) a UV-blocking, insulating dielectric disposed on the cathode electrode, the dielectric comprising an oxide or mixed oxide of one or more metals selected from the group consisting of strontium, iron, manganese, vanadium, chromium, cobalt, nickel, and copper;
- c) a gate electrode disposed on the dielectric;
- d) a plurality of vias through the gate electrode and dielectric that expose the cathode electrode;
- and
- e) an electron field emitter located in the vias.
3 more elements
A method of fabricating a cathode assembly comprising:
- a) coating a substrate with a first layer of conductive material;
- b) depositing a UV-blocking, insulating dielectric on the first layer of conductive material, the dielectric comprising an oxide or mixed oxide of one or more metals selected from the group consisting of strontium, iron, manganese, vanadium, chromium, cobalt, nickel, and copper;
- c) depositing a second layer of conductive material on the dielectric;
- d) forming one or more vias through the second layer of conductive material and the dielectric to expose the first layer of conductive material;
- and
- e) depositing an electron emitting material in the via(s).
3 more elements
Dependencies are inferred from the claim text.