Bandwidth-limited and long pulse master oscillator power oscillator laser systems

A excimer laser system comprising:

• a first excimer laser operating as a master oscillator and generating a beam of radiation, said first excimer laser including line narrowing elements;
• and
• a second excimer laser operating as a power oscillator arranged to receive and amplify said laser radiation beam, said second excimer laser including a discharge chamber holding an excimer gas, said discharge chamber having first and second ends, said discharge chamber being located within an optical resonator and wherein the laser radiation beam from the master oscillator enters the optical resonator adjacent the first end of the discharge chamber and wherein the amplified beam is coupled out of the optical resonator adjacent the first end of the discharge chamber and wherein said optical resonator further includes at least one prism located therein.