Exposure apparatus, exposure method, and method of manufacturing device
AssigneeNikon Corporation
InventorsTohru Kiuchi, Hideo Mizutani
Life of this patent
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AssigneeNikon Corporation
InventorsTohru Kiuchi, Hideo Mizutani
Estimating the term…
An exposure apparatus of one aspect of the present invention is provided with a moving mechanism that moves a first portion of a belt-shaped substrate that has photosensitivity in a first heading along a first direction and moves a second portion of the substrate in a second heading along the first direction, a stage mechanism that holds a mask and moves it in a third heading along a second direction in synchronization with the movement of the substrate, and a projection optical system. The projection optical system forms a first projection image of the pattern on the first portion so that the third heading on the mask and the first heading on the first portion optically correspond, and forms a second projection image of the pattern on the second portion so that the third heading on the mask and the second heading on the second portion optically correspond.
An exposure apparatus comprising:
An exposure method comprising:
Dependencies are inferred from the claim text.