System for accumulating exposure energy information of wafer and management method of mask for exposure utilizing exposure energy information of wafer accumulated with the system

A management method of a mask for exposure utilizing the exposure energy information accumulated with a system for accumulating the exposure energy information of wafers, the method comprising:

• a mask loading process in which new first to n-th exposure masks are loaded on the mask stages of first to n-th exposure apparatuses,
• an exposure mask ID transmission process in which the first to n-th exposure apparatuses read IDs(Serial Numbers) of the first to n-th exposure masks, respectively, which are loaded to the mask stages of the first to n-th exposure apparatuses at the mask loading process and transmit the read IDs to a data server through network lines,
• a light generation signal output process in which after the exposure mask ID transmission process, the first to n-th exposure apparatuses output light generation signals to first to n-th light sources,
• an exposure energy value output process in which the first to n-th exposure apparatuses receive the exposure light energy generated from the first to n-th light sources according to the light generation signals outputted from the light generation signal output process through first to n-th light transmission systems, expose wafers through the first to n-th exposure masks, measure the exposure energy values required for exposure and output the measured exposure energy values to the data server,
• a mask unloading process in which at the exposure energy value output process, when the respective exposure energy values required for exposing wafers are outputted to the data server and the exposure process is finished at the first to n-th exposure apparatuses, the first to n-th masks are unloaded from mask stages of the first to n-th exposure apparatuses,
• an exposure energy accumulation and calculation process by masks in which in the mask unloading process, when the first to n-th exposure apparatuses output the exposure energy values of the first to n-th masks to the data server, the data server accumulates and calculates the exposure energy data by the first to n-th masks,
• an exposure energy management process by masks in which at the exposure energy accumulation and calculation process by masks, the data server manages the exposure energy data accumulated and calculated by the first to n-th masks, and
• an exposure energy accumulation value output process by masks in which the data server outputs the exposure energy accumulation values by masks to the control room server so that users of masks and a mask inspector recognize the calculated exposure energy data by masks.