High reliability surveillance and/or identification tag/devices and methods of making and using the same

A surveillance and/or identification device comprising:

• a) a bottom capacitor electrode on a substrate, the bottom capacitor electrode having a substantially dome-shaped profile;
• b) a first dielectric layer on the bottom capacitor electrode;
• c) a top capacitor electrode on the first dielectric layer, the top capacitor electrode having a substantially dome-shaped profile;
• d) a second dielectric layer on the substrate, the second dielectric layer having first and second contact holes therein exposing the bottom capacitor electrode and the top capacitor electrode;
• and
• e) an antenna and/or inductor having a first end coupled and/or connected to the bottom capacitor electrode and a second end coupled and/or connected to the top capacitor electrode.