US 8,264,307 B2 · Dual substrate MEMS plate switch and method of manufacture

Abstract

Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. A hermetic seal may be made around the device with a larger, secondary enclosure. Electrical access to the deformable plate may be accomplished by an electrical path which is independent of the seal. The electrical path may include a via through the first substrate or the second substrate, or a flash deposited on an external region of the switch.

Claims22

Dependent claims

A method for manufacturing an electrostatic MEMS device, comprising:

providing a silicon-on-insulator substrate including a silicon device layer, and insulating layer and a silicon handle layer;
forming a first plate in the device layer of the silicon-on-insulator substrate and suspended adjacent to the handle layer of the silicon-on-insulator substrate, wherein the first plate is coupled to the silicon-on-insulator substrate by a plurality of spring beams;
forming an electrical contact on a second substrate, wherein the first plate is configured to move toward the at least one electrical contact when a voltage is applied between the first plate and the electrical contact;
coupling the device layer of the silicon-on-insulator substrate to the second substrate with a seal that seals the MEMS device;
forming and an electrical path which delivers the voltage to the first plate, wherein the electrical path is independent of the seal that seals the MEMS device.

2 more elements

Dependencies are inferred from the claim text.

Dual substrate MEMS plate switch and method of manufacture

Life of this patent

Dual substrate MEMS plate switch and method of manufacture

Life of this patent

Abstract

Claims22