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US 8,264,303 B2Granted
Composite substrate and elastic wave device using the same
AssigneeNGK Insulators, Ltd.
InventorKenji Suzuki
Life of this patent
Estimating the term…
Abstract
A composite substrate 10 includes: a piezoelectric substrate 12 capable of transmitting an elastic wave and composed of lithium tantalate (LT); a silicon support substrate 14 that is bonded to the rear surface of the piezoelectric substrate in the (111) plane; and an adhesive layer 16 bonding the substrates 12 and 14 to each other.
Claims7
A composite substrate comprising:
- a piezoelectric substrate capable of transmitting an elastic wave:
- and
- a silicon support substrate that is bonded to the rear surface of the piezoelectric substrate in the (111) plane via an organic adhesive layer and has a coefficient of thermal expansion smaller than that of the piezoelectric substrate.
Dependencies are inferred from the claim text.