Method for calibrating a broadband voltage/current probe
AssigneeMKS Instruments, Inc.
InventorRiad E. El-Chouelry
Life of this patent
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AssigneeMKS Instruments, Inc.
InventorRiad E. El-Chouelry
Estimating the term…
A calibration method for performing open circuit and closed circuit calibrations of a voltage/current (VI) probe. In one implementation the method may involve inserting a VI probe into a circuit including a first known load (Load 1) and a applying a first signal to the circuit. A first raw impedance (ZRAW1) may be measured using the Load 1. The VI probe may then be inserted into the circuit along with a second known load (Load 2) in place of the Load 1, and a second signal may be applied to the circuit. A second raw impedance (ZRAW2) may then be measured using the Load 2. A fixed reference impedance (ZR50) may then be defined. The first and second raw impedances, and the fixed reference impedance, may then be used in determining an open circuit impedance (ZOC) and a short circuit impedance (ZSC). The ZOC and ZSC impedances may then be used to determine a plurality of calibration coefficients for the VI probe.
A calibration method for performing open circuit and closed circuit calibrations of a voltage/current (VI) probe, the method comprising:
A calibration method for performing open circuit and closed circuit calibrations of a voltage/current (VI) probe, the method comprising:
The method of clam 9, further comprising using a radio frequency (RF) amplifier to receive the RF signal and to amplify the RF signal before the RF signal is applied to the circuit.
A calibration method for performing open circuit and closed circuit calibrations of a voltage/current (VI) probe, the method comprising:
Dependencies are inferred from the claim text.