Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events
AssigneeMKS Instruments, Inc.
InventorDavid J. Coumou
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Abstract
An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.
Claims25
An arc detection system for a plasma generation system, comprising:
- a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber;
- and
- a correlation module that generates an arc detect signal based on cross-correlating the first and second signals, wherein the arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.
An arc detection method for a plasma generation system, comprising:
- generating first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber;
- and
- generating an arc detect signal based on a cross-correlation of the first and second signals, wherein the arc detect signal indicates whether an arc is occurring in the plasma chamber;
- and
- employing the arc detect signal to vary an aspect of the RF power to extinguish the arc.
An arc detection system for a plasma generation system, comprising:
- a radio frequency (RF) sensor that generates first and second signals based on a respective electric properties RF power that is in communication with a plasma chamber;
- an analog-to-digital (A/D) conversion module that generates digital data based on the first and second signals;
- a subtraction module that subtracts values from the digital data;
- a window module that applies a window function to the digital data;
- a correlation module that cross-correlates the first and second signals as they are represented in the windowed digital data and that generates an arc detect signal based on the correlation, wherein the arc detect signal indicates whether an arc is occurring in the plasma chamber.
Dependencies are inferred from the claim text.