Systems, apparatus and methods for making an electrical connection
AssigneeApplied Materials, Inc.
InventorsWilliam P. Laceky, Izya Kremerman
Life of this patent
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Abstract
Systems, apparatus and methods are disclosed for allowing electrical connection to an electrical end effector in a robot apparatus. In one aspect, an electrical coupling is adapted to provide electrical power to the electrical end effector in the vacuum chamber. The electrical coupling may include engaging electrical contacts. In some embodiments, at least one of the contacts may be suspended relative to a spring such that the engaging contacts do not rotate relative to each other during arm rotation of the robot. In other embodiments, inductively coupled coils are included. Numerous other aspects are provided.
Claims21
A robotic system, comprising:
- a vacuum chamber;
- a robot apparatus adapted to transport substrates within the vacuum chamber, the robot apparatus including:
- a plurality of arms adapted to be rotated within the vacuum chamber,
- an electrical end effector attached to at least one of the plurality of arms, and
- an electrical coupling comprising selectively engaging contacts, the electrical coupling adapted to provide electrical energy to the electrical end effector in the vacuum chamber.
A substrate transporting robot apparatus adapted to move substrates within an electronic device processing system, comprising:
- a robot including at least one moveable arm and an electrical end effector attached to the at least one moveable arm;
- and
- an electrical coupling comprising selectively engaging electrical contacts, the electrical coupling adapted to provide electrical energy from a power source to the electrical end effector.
A method of moving a substrate within an electronic device processing tool, comprising the steps of:
- providing a robot within a vacuum chamber, the robot including an electrical end effector;
- and
- supplying electrical energy to electrical leads coupled to the electrical end effector by passing the electrical current through selectively engageable contacts.
A substrate transporting robot apparatus adapted to move substrates within an electronic device processing system, comprising:
- a robot including moveable arms and an electrical end effector attached to one of the arms;
- an electrical coupling comprising selectively engaging electrical contacts;
- and
- electrical leads coupled to the electrical end effector which pass through rotational joints of the moveable arms, wherein electrical energy is supplied to the electrical leads by passing an electrical current through the selectively engaging electrical contacts.
Dependencies are inferred from the claim text.