Semiconductor component with a trench edge termination
AssigneeInfineon Technologies Austria AG
InventorGerhard Schmidt
Life of this patent
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Abstract
A semiconductor component includes a semiconductor body having a first surface and a second surface, and having an inner region and an edge region. The semiconductor component further includes a pn-junction between a first semiconductor region of a first conductivity type and a second semiconductor region of a second conductivity type, the pn-junction extending in a lateral direction of the semiconductor body in the inner region. A first trench extends from the first side in the edge region into the semiconductor body. The trench has sidewalls that are arranged opposite to another and that are beveled relative to a horizontal direction of the semiconductor body.
Claims21
A semiconductor component, comprising:
- a semiconductor body having a first surface and a second surface, and having an inner region and an edge region;
- a pn junction between a first semiconductor region of a first conductivity type and a second semiconductor region of a second conductivity type, the pn-junction extending in a lateral direction of the semiconductor body in the inner region, wherein the first semiconductor region is arranged between the first surface and the second semiconductor region;
- a first trench extending from the first surface in the edge region into the semiconductor body, wherein the trench has sidewalls that are arranged opposite to one another and that are beveled relative to a horizontal direction of the semiconductor body;
- wherein the second semiconductor region extends beyond the first trench in the lateral direction.
Dependencies are inferred from the claim text.