Hybrid orientation accumulation mode GAA CMOSFET

A hybrid orientation accumulation mode GAA (Gate-All-Around) CMOSFET (Complementary Metal Oxide Semiconductor Field Effect Transistor) comprising:

• a semiconductor substrate;
• an NMOS region having a second channel, the NMOS region is stacked up above the semiconductor substrate,
• a PMOS region having a first channel, the PMOS region is stacked up above the NMOS region;
• a gate region, said gate region surrounds two surfaces of the first channel and the second channel substantially;
• the NMOS region and the PMOS region each includes a source region and a drain region located at the two opposite ends of the channel thereof, wherein;
• the first channel and the second channel each has a racetrack-shaped cross section having a rectangular central portion and two substantially semicircular end portions contacting the opposite ends of the rectangular central portion, the first channel is stacked up above the second channel and each of them is parallel to the semiconductor substrate, the first channel is formed of p-type Si(110) and the second channel is formed of n-type Si(100);
• a first buried oxide layer is disposed between the PMOS region and the NMOS region other than the gate region;
• and
• a second buried oxide layer is disposed between the NMOS region and the semiconductor substrate other than the gate region.