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US 8,264,019 B2Granted
Multiplexed output two terminal photodiode array for imaging applications and related fabrication process
AssigneeSTMicroelectronics S.r.l.
InventorMassimo Cataldo Mazzillo
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Abstract
A detector array for an imaging system may exploit the different sensitivities of array pixels to an incident flux of low energy photons with a wavelength falling near the high end of the range of sensitivity of the semiconductor. The detector array may provide the de-multiplexable spatial information. The detector array may include a two-terminal multi-pixel array of Schottky photodiodes electrically connected in parallel.
Claims8
A multi-pixel photodetector array comprising:
- a semiconductor substrate;
- a plurality of Schottky photodiodes on said semiconductor substrate, each Schottky photodiode comprising a plurality of metal filled anode contacts having a depth different than a depth of metal filled anode contacts of at least one other Schottky photodiode;
- a common cathode contact coupled to said plurality of Schottky photodiodes and defining a first connection lead;
- and
- a front metallization layer adjacent said semiconductor substrate and defining a common anode collecting grid coupled to said plurality of metal filled anode contacts and defining a second connection lead.
2 more elements
A multi-pixel photo detector array comprising:
- a semiconductor substrate;
- a plurality of Schottky photodiodes on said semiconductor substrate, each Schottky photodiode comprising a plurality of metal filled anode contacts having a depth different than a depth of metal filled anode contacts of at least one other Schottky photodiode;
- a common cathode coupled to said plurality of Schottky photodiodes;
- and
- a common anode collecting grid coupled to said plurality of metal filled anode contacts.
2 more elements
Dependencies are inferred from the claim text.