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US 8,263,950 B2Granted
Radiation source
AssigneeASML Netherlands B.V.
InventorsWouter Anthon Soer, Maarten Marinus Johannes Wilhelmus Van Herpen, Kurt Gielissen, Martin Jacobus Johan Jak
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Abstract
A radiation source may include a radiation emitter for emitting radiation, a collector for collecting radiation emitted by the radiation emitter, and an outlet configured, in use, to introduce a cooled gas into the radiation source.
Claims15
A radiation source comprising:
- a radiation emitter configured to emit radiation;
- a collector configured to collect radiation emitted by the radiation emitter;
- and
- an outlet configured to introduce a cooled gas into the radiation source,
- wherein the cooled gas suppresses an amount of debris generated by the radiation emitter from contacting or entering the collector.
2 more elements
A radiation source arrangement comprising:
- a radiation emitter configured to emit radiation;
- a collector configured to collect radiation emitted by the radiation emitter;
- an outlet configured to introduce a cooled gas into the radiation source;
- and
- a source of the cooled gas, pressurized gas or liquefied gas in connection with the outlet,
- wherein the cooled gas suppresses an amount of debris generated by the radiation emitter from contacting or entering the collector.
3 more elements
A lithographic apparatus comprising:
- a radiation source comprising:
- a radiation emitter configured to emit radiation;
- a collector configured to collect radiation emitted by the radiation emitter;
- and
- an outlet configured to introduce a cooled gas into the radiation source,
- wherein the cooled gas suppresses an amount of debris generated by the radiation emitter from contacting or entering the collector;
- a patterning device configured to pattern the radiation;
- and
- a projection system configured to direct the patterned radiation onto a substrate.
6 more elements
A method comprising:
- operating a radiation source comprising:
- a radiation emitter configured to emit radiation;
- a collector configured to collect radiation emitted by the radiation emitter;
- and
- an outlet configured to introduce a cooled gas into the radiation source;
- introducing the cooled gas into the radiation source via the outlet of the radiation source,
- wherein the cooled gas suppresses an amount of debris generated by the radiation emitter from contacting or entering the collector.
4 more elements
Dependencies are inferred from the claim text.