Transmission electron microscope having electron spectroscope

A transmission electron microscope comprising:

• an electron gun for emitting an electron beam;
• a convergent lens group for causing the electron beam emitted by the electron gun to converge;
• an imaging lens group for imaging the electron beam after the electron beam passes through a sample;
• an image detector for detecting an image of the electron beam;
• a view field restriction slit for selecting an area that is to be observed and is included in the sample;
• an electron spectroscope for spectrally decomposing the electron beam based on the amount of energy of the electron beam after the electron beam passes through the sample;
• a spectrum correction system;
• and
• a data storage device, wherein:
• the electron spectroscope outputs a spectral image acquired by setting a focal point of the electron beam focused in a energy dispersion direction on a plane and by setting another focal point of the electron beam focused in a direction perpendicular to the energy dispersion direction on another plane,
• the spectrum correction system:
• compares a spectrum extracted from a standard spectral image at a standard position with a spectrum extracted from the standard spectral image at each position other than the standard position,
• calculates correction information at each position based on a difference between the spectrum at the standard position and the spectrum at each position other than the standard position, the difference based on a zero loss spectral image or an electron energy loss spectral image acquired from a sample to be analyzed, and
• corrects the spectrum of the spectral image from the sample at each position based on the correction information, and
• the data storage device stores the corrected spectrum therein.