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US 8,263,933 B2Granted
Device and method for analyzing an organic sample
AssigneeCarl Zeiss NTS GmbH
InventorUlrike Zeile
Life of this patent
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Abstract
A device and method for analyzing an organic sample provide high spatial resolution. A focused ion beam is directed onto the organic sample. Fragments detached from the sample are examined using mass spectroscopy.
Claims19
A method for analyzing an organic sample, comprising:
- generating ions having at least one of:
- a predefinable mass and a predefinable number of elementary charges;
- generating at least one ion beam from the ions;
- directing the ion beam onto at least one organic sample;
- detecting at least one fragment, wherein the fragment is detached from the organic sample using the ion beam, and wherein detecting the at least one fragment includes using an ion mass analyzer to generate a mass spectrum;
- comparing the generated mass spectrum with at least one mass spectrum stored in a database;
- and
- determining at least one material of the organic sample based on the comparison between the generated mass spectrum and the stored mass spectrum.
5 more elements
An ion beam device for analyzing an organic sample, comprising:
- at least one ion generator that generates ions which have at least one of:
- a predefinable mass and a predefinable number of elementary charges;
- at least one ion beam generator that generates at least one ion beam from the ions;
- at least one ion beam director that directs the ion beam onto at least one organic sample;
- at least one detector that detects at least one fragment which is detached from the organic sample using the ion beam, the detector having at least one ion mass analyzer that generates a mass spectrum;
- at least one comparing device that compares the generated mass spectrum with at least one mass spectrum stored in a database;
- and
- at least one determining device that determines at least one material of which the organic sample is composed on the basis of the comparison between the generated mass spectrum and the stored mass spectrum.
5 more elements
Dependencies are inferred from the claim text.