Laser beam processing machine
AssigneeDisco Corporation
InventorsJun Maehara, Yukio Morishige
Life of this patent
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Abstract
A laser beam processing machine is provided which includes a laser beam irradiation unit including a laser beam oscillation unit and a processing head provided with a condenser lens condensing a laser beam oscillated from the laser beam oscillation unit. The processing head includes a liquid column forming mechanism provided with a jet nozzle adapted to jet liquid along an optical path for the laser beam condensed by the condenser lens, and a water droplet suction mechanism disposed below the liquid column forming mechanism and provided with an insertion passage through which a liquid column jetted from the jet nozzle is passed and with an annular suction port formed to surround the insertion passage and communicate with suction means.
Claims4
A laser beam processing machine comprising:
- a chuck table holding a workpiece;
- laser beam irradiation means for directing a laser beam to the workpiece held by the chuck table;
- and
- processing-transfer means for processing-transferring the chuck table and laser beam irradiation means in a relative manner;
- wherein said laser beam irradiation means includes laser beam oscillation means and a processing head having a condenser lens condensing a laser beam oscillated from the laser beam oscillation means, and
- said processing head includes a liquid column forming mechanism provided with a jet nozzle adapted to jet liquid along an optical path for the laser beam condensed by the condenser lens, and a water droplet suction mechanism disposed below the liquid column forming mechanism and provided with an insertion passage through which a liquid column jetted from the jet nozzle is passed and with an annular suction port formed to surround the insertion passage and communicate with suction means.
Dependencies are inferred from the claim text.