Method of forming memory with floating gates including self-aligned metal nanodots using a coupling layer

A method for fabricating a memory device, comprising:

• applying a coupling agent layer on a gate oxide layer, the gate oxide layer is on a substrate;
• applying metal particles to the coupling agent layer, the metal particles react with the coupling agent layer and become negatively charged;
• rinsing the coupling agent layer from the substrate, leaving the negatively charged metal particles on the gate oxide layer, the rinsing uses a solvent, the solvent does not include a reducing agent which neutralizes the metal particles;
• depositing a floating gate layer on the gate oxide layer, the floating gate layer encompasses the negatively charged metal particles;
• forming memory elements on the substrate which include the gate oxide layer, the negatively charged metal particles and the floating gate layer;
• and
• after the memory elements are formed, neutralizing the negative charge of the metal particles which was caused by the metal particles reacting with the coupling agent layer, the neutralizing comprises applying a voltage to the substrate, the voltage causes the metal particles to become charge neutral.