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US 8,263,318 B2Granted
Methods for mastering microstructures through a substrate using negative photoresist
AssigneeBright View Technologies, Inc.
InventorsRobert P. Freese, Thomas A. Rinehart, Robert L. Wood
Life of this patent
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Abstract
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
Claims17
A method of fabricating an array of microstructures comprising:
- scanning a radiation beam at varying amplitude through a substrate that is transparent thereto into a negative photoresist layer on the substrate to image the array of microstructures in the negative photoresist layer.
Dependencies are inferred from the claim text.