Color filter and method of fabricating the same
AssigneeIndustrial Technology Research Institute
InventorsPin-Chen Chen, Hui-Lung Kuo, Chih-Ho Chiu, Liang-Bin Yu
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Abstract
A color filter having a bi-layer metal grating is formed by nanoimprint lithography. Nanoimprint lithography, a low cost technology, includes two alternatives, i.e., hot-embossing nanoimprint lithography and UV-curable nanoimprint lithography. Manufacture steps includes providing a substrate with a polymer material layer disposed thereon. A plurality of lands and grooves are formed in the polymer material layer, and a first metal layer and a second metal layer are disposed on the surfaces of the lands and grooves, respectively. Finally, a color filter having a bi-layer metal grating is obtained.
Claims28
A method of fabricating a color filter, the color filter comprising a substrate;
- a polymer layer disposed on the substrate, having a plurality of lands and grooves;
- a first metal layer disposed on the lands;
- and a second metal layer disposed on the grooves, wherein the color filter is transmissive and can generate polarized light with polarized light transmission of red light, green light and blue light at a peak wavelength over 70%, the method comprising:
- providing the substrate;
- forming the polymer layer on the substrate;
- forming the plurality of grooves and lands in the polymer layer;
- forming the first metal layer on the lands;
- and
- forming the second metal layer on the grooves.
A color filter, comprising:
- a substrate;
- a polymer layer disposed on the substrate, having a plurality of lands and grooves;
- a first metal layer disposed on the lands;
- and
- a second metal layer disposed on the grooves, wherein the color filter is transmissive and can generate polarized light with polarized light transmission of red light, green light and blue light at a peak wavelength over 70%.
Dependencies are inferred from the claim text.