Method for manufacturing color organic EL display
AssigneeDenso Corporation
InventorsTaizo Ishida, Kahoru Mori, Shigeru Miyaji, Shoichi Kawai, Ryonosuke Tera, Koji Ino
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Abstract
A color organic EL display includes: a substrate; a color filter layer disposed on the substrate; a gas barrier layer disposed on the color filter layer; and an organic EL structural body disposed on the gas barrier layer. The substrate and the color filter layer provide an underlayer of the gas barrier layer. The underlayer is a degassed underlayer. The gas barrier layer is provided by an atomic layer deposition method at a temperature equal to or lower than a decomposition starting temperature of the color filter layer.
Claims14
A method for manufacturing a color organic EL display including a substrate, a color filter layer, a gas barrier layer and an organic EL structural body, which are stacked in this order, wherein the substrate and the color filter layer provide an underlayer of the gas barrier layer, the method comprising the steps of:
- degassing the underlayer of the gas barrier layer;
- and
- forming the gas barrier layer by an atomic layer deposition method in such a manner that a plurality of raw material gases are alternately introduced on the substrate under reduced pressure at a temperature equal to or lower than a decomposition starting temperature of the color filter layer,
- wherein the substrate is preserved in a dry atmosphere from when the step of degassing ends to when the step of forming the gas barrier layer begins.
Dependencies are inferred from the claim text.