Light emitting device and method for manufacturing light emitting device
AssigneesTokyo Electron Limited, National University Corporation Tohoku University
InventorsYasushi Yagi, Shingo Watanabe, Toshihisa Nozawa, Chuichi Kawamura, Kimihiko Yoshino, Tadahiro Ohmi
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Abstract
Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.
Claims11
A light emitting device manufacturing method for forming, on a device forming surface of a target substrate, a light emitting device having multiple layers including an organic layer, the method comprising:
- a plurality of substrate processing steps respectively performed in a plurality of processing chambers,
- wherein, in the plurality of processing chambers, a process is performed on the target substrate while the device forming surface is oriented toward a direction opposite to a direction of gravity,
- wherein, in one of the plurality of processing chambers, a plurality of film forming source gases are simultaneously supplied to the device forming surface of the target substrate so as to form the multiple layers of the light emitting device.
Dependencies are inferred from the claim text.