Method for removing micro-bubbles and/or particles from liquid, liquid supply apparatus and immersion exposure apparatus
AssigneeUnited Microelectronics Corp.
InventorsChin-Sheng Yang, Wen-Sheng Chien
Life of this patent
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Abstract
A liquid supply apparatus capable of removing micro-bubbles and particles is described, including a pipe, a laser provider and at least one micro-bubble/particle outlet. The laser provider provides a laser crossing the pipe, wherein the laser is provided in a manner such that a micro-bubble/particle blocking/repelling barrier is formed crossing the pipe blocking or repelling micro-bubbles, particles or both in the liquid in the pipe. The micro-bubble/particle outlet is disposed on the pipe between the barrier and the liquid inlet of the pipe, adjacent to the barrier for discharging micro-bubbles, particles or both.
Claims8
A method for removing micro-bubbles, particles or both from a liquid, comprising:
- providing a pipe having a liquid inlet, a liquid outlet, and a micro-bubble/particle outlet thereon;
- and
- providing a laser light layer crossing the pipe, wherein the laser light layer is provided in a manner such that the laser light layer serves as a micro-bubble/particle blocking/repelling barrier crossing the pipe for blocking/repelling micro-bubbles, particles or both in the liquid to allow the micro-bubbles, particles or both to accumulate in front of or on the micro-bubble/particle blocking/repelling barrier,
- wherein the micro-bubble/particle outlet is located on the pipe between the micro-bubble/particle blocking/repelling barrier and the liquid inlet, adjacent to the micro-bubble/particle blocking/repelling barrier for discharging the micro-bubbles, particles or both.
Dependencies are inferred from the claim text.