Anode assembly for electroplating
AssigneesMetakem Gesellschaft fur Schichtchemie der Metalle mbH, M. P. C. Micropulse Plating Concepts
InventorsJörg Wurm, Stephane Menard, Lothar Schneider
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AssigneesMetakem Gesellschaft fur Schichtchemie der Metalle mbH, M. P. C. Micropulse Plating Concepts
InventorsJörg Wurm, Stephane Menard, Lothar Schneider
Estimating the term…
The invention relates to an anode assembly for electroplating comprising (a) an anode body comprising soluble anode material and (b) a shielding covering at least part of the anode body and comprising a self-passivating metal electrically connected to the anode body and allowing electrolyte transport therethrough. The shielding comprises at least one layer of self-passivating metal having no openings larger than 2 mm, preferably 1 mm, in width or the shielding comprises at least two layers of self-passivating metal wherein the openings of at least one layer are at least partially covered by the metal of another layer. The invention also relates to a shielded anode basket, a method for electroplating and the use of the anode assembly and the shielded anode basket.
Anode assembly for electroplating comprising
Shielded anode basket comprising
Dependencies are inferred from the claim text.