Plating method and apparatus with multiple internally irrigated chambers
AssigneeNovellus Systems, Inc.
InventorsSteven T. Mayer, Shantinath Ghongadi, Kousik Ganesan, Zhian He, Jingbin Feng
Life of this patent
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Abstract
An apparatus for electroplating a layer of metal onto a work piece surface includes a membrane separating the chamber of the apparatus into a catholyte chamber and an anolyte chamber. In the catholyte chamber is a catholyte manifold region that includes a catholyte manifold and at least one flow distribution tube. The catholyte manifold and at least one flow distribution tube serve to mix and direct catholyte flow in the catholyte chamber. The provided configuration effectively reduces failure and improves the operational ranges of the apparatus.
Claims21
An apparatus for electroplating a layer of metal onto a work piece surface, the apparatus comprising:
- (a) a chamber;
- (b) a membrane separating the chamber into an anolyte chamber and a catholyte chamber;
- and
- (c) a catholyte manifold region associated with the catholyte chamber, the catholyte manifold region comprising:
- a ring-shaped catholyte manifold, and
- at least one flow distribution tube associated with the catholyte manifold, the at least one flow distribution tube being located wholly within the catholyte chamber.
An apparatus for electroplating a layer of metal onto a work piece surface, the apparatus comprising:
- (a) a chamber;
- (b) a membrane separating the chamber into an anolyte chamber and a catholyte chamber;
- (c) a catholyte manifold region associated with the catholyte chamber, the catholyte manifold region comprising:
- a ring-shaped catholyte manifold, wherein the catholyte manifold includes holes configured to deliver a flow of an electrolyte,
- at least one flow distribution tube associated with the catholyte manifold, the at least one flow distribution tube being located wholly within the catholyte chamber;
- and
- (d) an anolyte manifold region associated with the anolyte chamber, the anolyte manifold region comprising:
- an anolyte manifold, and
- at least one flow distribution tube associated with the anolyte manifold.
A method of electroplating a layer of metal onto a work piece surface, comprising:
- (a) holding a work piece in a work piece holder of an electroplating apparatus, wherein the apparatus includes a membrane separating the chamber into an anolyte chamber and a catholyte chamber, wherein the catholyte chamber includes:
- a ring-shaped catholyte manifold, and
- at least one flow distribution tube associated with the catholyte manifold and located wholly within the catholyte chamber, the catholyte manifold and the at least one flow distribution tube configured to increase convection of an electrolyte at the membrane;
- (b) removing oxygen from the electrolyte;
- and
- (c) supplying current to the work piece to plate a metal layer onto a work piece surface.
Dependencies are inferred from the claim text.