Defect correcting apparatus and defect correcting method
AssigneeSony Corporation
InventorsAkiko Oka, Gaku Izumi, Tomoaki Honda
Life of this patent
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Abstract
The present disclosure provides a defect correcting apparatus including a defect detecting device configured to detect a defect within a repetitive pattern in a multilayer substrate a defect correcting device configured to correct the defect in the multilayer substrate by a specified defect correcting method, and a control device configured to, when the defect detected by the defect detecting device is detected overlapping a region in which occurrence of an interlayer short-circuit defect is assumed, generate an object corresponding to the defect correcting method for the interlayer short-circuit defect, and controlling the defect correcting device for correcting the defect using the generated object.
Claims6
A defect correcting apparatus comprising:
- a defect detecting device configured to detect a defect within a repetitive pattern in a multilayer substrate;
- a defect correcting device configured to correct the defect in said multilayer substrate by a specified defect correcting method;
- and
- a control device configured to, when the defect detected by said defect detecting device is detected overlapping a region in which occurrence of an interlayer short-circuit defect is assumed, (1) generate an object corresponding to the defect correcting method for the interlayer short-circuit defect, and (2) control said defect correcting device to correct said defect using the generated object.
A defect correcting method comprising:
- detecting a defect within a repetitive pattern in a multilayer substrate by a defect detecting device in a defect correcting apparatus;
- when the defect detected by said defect detecting device is detected overlapping a region in which occurrence of an interlayer short-circuit defect is assumed, generating an object corresponding to a defect correcting method for the interlayer short-circuit defect by a control device in said defect correcting apparatus;
- and
- controlling said defect correcting device to correct said defect using the generated object by said control device.
Dependencies are inferred from the claim text.