Liquid ejecting head, liquid ejecting apparatus and piezoelectric element
AssigneeSeiko Epson Corporation
InventorsKoichi Morozumi, Jiro Kato, Satoshi Denda, Ichiro Asaoka
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Abstract
A liquid ejecting head including a pressure generating chamber that communicates with a nozzle opening that ejects liquid and a piezoelectric element that generates a pressure change in the pressure generating chamber. The piezoelectric element includes a first electrode, a piezoelectric body layer that is formed on the first electrode which includes a grain-shaped region, and a second electrode that is formed on a side of the piezoelectric body layer that is opposite to the first electrode.
Claims17
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric body layer that is formed above the first electrode;
- and
- a second electrode that is formed above the piezoelectric body layer,
- wherein the piezoelectric body layer includes band-shaped regions and grain-shaped regions, wherein region boundaries between the band-shaped regions are linear shaped and wherein region boundaries between the grain-shaped regions are non-linear shaped, and
- wherein the grain-shaped regions are formed at least in a center portion of the piezoelectric body layer in the thickness direction and the band-shaped regions are formed at least on the first electrode side,
- wherein a crystal alignment of the band-shaped regions is different from a crystal alignment of the grain-shaped regions.
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric body layer that is formed above the first electrode;
- and
- a second electrode that is formed above the piezoelectric body layer,
- wherein the piezoelectric body layer includes first regions that are substantially spherical and/or substantially polyhedral in shape at least in a center portion of the piezoelectric body layer in the thickness direction and second regions,
- wherein boundaries between the first regions in the center portion are non-linear shaped, and
- wherein a crystal alignment of the second regions is different from a crystal alignment of the first regions.
A piezoelectric element comprising:
- a first electrode;
- a piezoelectric body layer that is formed above the first electrode, the piezoelectric body layer including a first region having a first crystal alignment and a second region having a second crystal alignment;
- and
- a second electrode that is formed above the piezoelectric body layer,
- wherein the first region of the piezoelectric body layer includes a plurality of grain-shaped regions that are bounded by non-linear shaped boundaries at least in a center portion of the piezoelectric body layer in the thickness direction and band-shaped regions at least at the first electrode side in the thickness direction, the band-shaped regions bounded by linear shaped boundaries.
Dependencies are inferred from the claim text.