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US 8,262,200 B2Granted
Non-wetting coating on a fluid ejector
AssigneeFUJIFILM Corporation
InventorYoshimasa Okamura
Life of this patent
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Abstract
A method of forming a non-wetting coating on a fluid ejector includes applying an oxygen plasma to a substrate to form an outer portion of the substrate having a density that is greater than a density of an interior portion of the substrate and depositing a non-wetting coating on an exterior surface of the outer portion. The outer portion is less than 80 Å thick.
Claims19
A method of forming a non-wetting coating on a fluid ejector, comprising:
- prior to depositing a non-wetting coating, applying an oxygen plasma to a silicon substrate to form an outer portion of the substrate having a density that is greater than a density of an interior portion of the substrate, the outer portion less than 80 Å thick;
- and
- after applying the oxygen plasma to form the outer portion of the substrate, depositing the non-wetting coating directly on an exterior surface of the outer portion formed by applying the oxygen plasma.
A method of forming a non-wetting coating on a fluid ejector, comprising:
- prior to depositing a non-wetting coating, applying an oxygen plasma to a substrate to form an outer portion of the substrate having a density that is greater than a density of an interior portion of the substrate, the outer portion less than 80 Å thick;
- and
- after applying the oxygen plasma to form the outer portion of the substrate, depositing the non-wetting coating on an exterior surface of the outer portion, wherein the non-wetting coating is a self-assembled monolayer, and wherein the non-wetting coating is between 5 Å and 30 Å thick.
A method of forming a non-wetting coating on a fluid ejector, comprising:
- prior to depositing a non-wetting coating, applying an oxygen plasma to a substrate to form an outer portion of the substrate having a density that is greater than a density of an interior portion of the substrate, the outer portion less than 80 Å thick;
- and
- after applying the oxygen plasma to form the outer portion of the substrate, depositing the non-wetting coating on an exterior surface of the outer portion, wherein the non-wetting coating is a molecular aggregation, and wherein the non-wetting coating is between 10 Å and 1,000 Å thick.
Dependencies are inferred from the claim text.