Droplet jetting head, method of manufacturing droplet jetting head, and droplet jetting apparatus equipped with droplet jetting head

A method of manufacturing a droplet jetting head that jets droplets to a recording medium on the basis of image information, thereby forming dots on the recording medium to form an image indicated by the image information on the recording medium, the method comprising:

• forming a patterned mask to create a flow passage in a silicon substrate used in the fabrication of a first substrate that forms a flow passage;
• curing the patterned mask, in which the patterned mask is heated to form a round shape at the end of the patterned mask;
• forming a through hole by dry etching, and then providing a round shape to an end of the through hole by dry etching, thereby providing the first substrate with a through hole having a round shape having a curvature radius of 1 to 100 μm formed at an end thereof;
• and
• bonding the first substrate with a second substrate having a pressure chamber with an adhesive, so that the through hole of the obtained first substrate, and an opening that supplies liquid to the pressure chamber in the second substrate substantially align with each other.