Processing gas supplying system and processing gas supplying method

A gas supplying method of a gas supplying system for supplying a processing gas to a processing apparatus, the gas supplying system including a processing gas supply source for supplying the processing gas;

• a gas supply pipe for supplying the processing gas from the processing gas supply source into the processing apparatus;
• a nonreactive gas supply source for supplying a nonreactive gas into the gas supply pipe;
• a vacuum evacuation unit for evacuating the inside of the gas supply pipe to vacuum;
• and a control unit for receiving a signal from the processing apparatus and controlling an inner state of the gas supply pipe in response to the received signal, the method comprising:
• keeping the gas supply pipe charged with the nonreactive gas to be in a standby state while the system is in operation;
• exhausting, if the control unit receives a processing gas use start signal from the processing apparatus, the nonreactive gas from the gas supply pipe to create a vacuum therein by the vacuum evacuation unit, charging the gas supply pipe with the processing gas supplied from the processing gas supply source, and then starting a supply of the processing gas from the processing gas supply source;
• and
• stopping, if the control unit receives a processing gas use finish signal from the processing apparatus, the supply of the processing gas from the processing gas supply source, exhausting the processing gas from the gas supply pipe to create a vacuum therein by the vacuum evacuation unit, and then charging the gas supply pipe with the nonreactive gas supplied from the nonreactive gas supply source.

A gas supplying system for supplying a processing gas to a plurality of processing apparatuses, respectively, comprising:

• a processing gas supply source for supplying the processing gas;
• a gas supply pipe connected to the processing gas supply source;
• a multiplicity of branch pipes for splitting the processing gas from the gas supply pipe to supply the processing gas into the plurality of processing apparatuses, respectively;
• a nonreactive gas supply source for supplying a nonreactive gas into the gas supply pipe and the multiplicity of branch pipes;
• a vacuum evacuation unit for exhausting the gas supply pipe and the multiplicity of branch pipes to vacuum;
• and
• a control unit for receiving a signal from the processing apparatus and controlling inner states of the gas supply pipe and the multiplicity of branch pipes in response to the received signal,
• wherein the control unit keeps the gas supply pipe and the multiplicity of branch pipes charged with the nonreactive gas to be in a standby state while the system is in operation;
• the control unit exhausts, if a processing gas use start signal is received from the processing apparatus, the nonreactive gas from the gas supply pipe and a part of the branch pipes currently being used to create a vacuum therein by the vacuum evacuation unit, then charges the gas supply pipe and the part of the branch pipes with the processing gas, and then starts a supply of the processing gas;
• and
• the control unit stops, if a processing gas use finish signal is received from the processing apparatus, the supply of the processing gas;
• then exhausts the processing gas from the gas supply pipe and a portion of the branch pipes not to be used to create a vacuum therein by the vacuum evacuation unit;
• and then charges the gas supply pipe and the portion of the branch pipes with the nonreactive gas.

A gas supplying method of a gas supplying system for supplying a processing gas to a plurality of processing apparatuses, respectively, the gas supplying system including a processing gas supply source for supplying the processing gas;

• a gas supply pipe connected to the processing gas supply source;
• a multiplicity of branch pipes for splitting the processing gas from the gas supply pipe to supply the processing gas into the plurality of processing apparatuses, respectively;
• a nonreactive gas supply source for supplying a nonreactive gas into the gas supply pipe and the multiplicity of branch pipes;
• a vacuum evacuation unit for exhausting the gas supply pipe and the multiplicity of branch pipes to vacuum;
• and a control unit for receiving a signal from the processing apparatus and controlling inner states of the gas supply pipe and the multiplicity of branch pipes in response to the received signal, the method comprising:
• keeping the gas supply pipe and the multiplicity of branch pipes charged with the nonreactive gas to be in a standby state while the system is in operation;
• exhausting, if the control unit receives a processing gas use start signal from the processing apparatus, the nonreactive gas from the gas supply pipe and a part of the branch pipes currently being used to create a vacuum therein by the vacuum evacuation unit, then charging the gas supply pipe and the part of the branch pipes with the processing gas, and then starting a supply of the processing gas;
• and
• stopping, if a processing gas use finish signal is received from the processing apparatus, the supply of the processing gas;
• exhausting the processing gas from the gas supply pipe and a portion of the branch pipes not to be used to create a vacuum therein by the vacuum evacuation unit;
• and then charging the gas supply pipe and the portion of the branch pipes with the nonreactive gas.