Three-dimensional nanoscale metrology using FIRAT probe
AssigneeGeorgia Tech Research Corporation
InventorFahrettin L. Degertekin
Life of this patent
Estimating the term…
Abstract
In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement.
Claims13
A method of causing a probe tip of a force sensor structure to move in three dimensions, comprising the steps of:
- a. forming a flexible mechanical structure a first distance above a detection surface so as to form a gap between the flexible mechanical structure and the detection surface;
- b. placing the probe tip on the flexible mechanical structure so as to point toward the detection surface;
- c. arranging at least a pair of actuator electrodes on the flexible mechanical structure and opposed to electrodes arranged on the detection surface;
- d. selectively activating at least one of the actuator electrodes thereby deflecting the flexible mechanical structure at a selected location so that the flexible mechanical structure causes the probe tip to move in more than one dimension.
Dependencies are inferred from the claim text.