Leak detection system
AssigneeUlvac, Inc.
InventorsTakayuki Maehira, Ryuichi Wakamatsu, Eiichi Sato
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AssigneeUlvac, Inc.
InventorsTakayuki Maehira, Ryuichi Wakamatsu, Eiichi Sato
Estimating the term…
A leak detection system has: a test chamber connected to a vacuum pump; a filling device for filling a test piece with helium gas; a transfer device for transferring the test piece between a ready-for-detection position in which the test piece is ready to be carried into the test chamber and a filling-operation position in which the operation of filling helium gas by the filling device is performed; a carrying device for carrying the test piece from the ready-for-detection position to a detection position inside the test chamber; a sealing device for hermetically sealing the test chamber in a state in which the helium-gas-filled test piece is in the detection position; and a leak detector for detecting helium to be leaked out of the test piece when, after having sealed the test chamber by the sealing device, the test chamber is evacuated by the vacuum pump to a predetermined pressure.
A leak detection system, comprising:
Dependencies are inferred from the claim text.