Method for assembling a 3-dimensional microelectrode structure

A method for assembling a 3-dimensional microelectrode structure, comprising the steps of:

• Step a:
• fabricating 2-dimensional microelectrode arrays, wherein each of said 2-dimensional microelectrode arrays includes a base, a plurality of probes, a plurality of alignment members and a plurality of positioning members, and wherein said probes, said alignment members and said positioning members are connected to said base, and wherein each of said probes has at least one electrode, and wherein said at least one electrode is electrically connected to at least one of the plurality of the alignment members via a corresponding wire;
• Step b:
• stacking said 2-dimensional microelectrode arrays to form a 3-dimensional microelectrode array, wherein said alignment members of said 2-dimensional microelectrode arrays are neatly arranged at predetermined positions;
• and
• Step c:
• assembling said 3-dimensional microelectrode array to a carrier chip to form the 3-dimensional microelectrode structure, wherein said alignment members are electrically connected to a plurality of electric-connection pads of said carrier chip correspondingly.