Method and system for robot calibrations with a camera

A machine-accessible medium including data that, when accessed by a machine, cause the machine to perform a method comprising:

• manually calibrating a center of a robot blade aligned with respect to a target, which is located in a process chamber;
• recording a first positional value of the center of the robot blade aligned with respect to a camera station based on the camera station capturing an image of the center of the robot blade in alignment with a center of the camera station during the calibration of the robot, wherein the camera station is remotely located from the robot blade while capturing the image;
• automatically determining a second positional value of the center of the robot blade aligned with respect to the camera station during a recalibration of the robot;
• and
• automatically recalibrating the robot blade based on an offset between the second positional value and the first positional value exceeding a tolerance offset from the first positional value, wherein the recalibration of the robot occurs automatically without opening the process chamber.

A manufacturing machine, comprising:

• a plurality of process chambers;
• a transfer chamber having a robot to transfer devices between the transfer chamber and the processing chambers;
• a load station coupled to the transfer chamber with the robot capable of transferring the devices between the load station and transfer chamber;
• a chamber port between the transfer chamber and a processing chamber;
• a camera station attached to the transfer chamber, the load station, or the chamber port while capturing images;
• and
• a processing unit to control operations of the robot, wherein the robot is manually calibrated with respect to a processing chamber having a lid in an open position and then subsequently the robot is automatically recalibrated with respect to the processing chamber having the lid in a closed position based on images captured by the camera station.