Out-of-plane MEMS resonator with static out-of-plane deflection

A microelectromechanical systems (MEMS) device comprising:

• a tuning electrode;
• a drive electrode;
• a resonator anchored to a substrate and configured to resonate in response to a signal on the drive electrode, the resonator comprising:
• a central beam;
• and
• a lattice portion positioned at a first end of the central beam, the lattice portion forming a perimeter around the drive electrode;
• and
• a tuning plate positioned above the tuning electrode, the tuning plate being configured to adjust a resonant frequency of the resonator in response to a voltage difference between the resonator and the tuning electrode.

A method of operating a microelectromechanical systems (MEMS) resonator, the method comprising:

• causing a resonator to resonate by providing a drive electrode with a signal;
• and
• tuning a resonant frequency of the resonator by applying a voltage difference between a tuning electrode and the resonator,
• wherein a drive capacitance established by the drive electrode is substantially linear with dynamic displacement of the resonator.

A microelectromechanical systems (MEMS) device comprising:

• a resonator anchored to a substrate, the resonator comprising:
• a first beam anchored to the substrate;
• and
• first and second released portions on opposing sides of a width of the beam, the resonator being configured to undergo a torsional deformation about an axis extending through a length of the beam in response to a drive signal;
• and
• a first electrode anchored to the substrate,
• wherein the first and second released portions comprise first and second lattice portions, respectively, and the first lattice portion includes a first lattice opening that forms a perimeter around the first electrode.