Double rie damascene process for nose length control
AssigneeWestern Digital (Fremont), LLC
InventorsLijie Guan, Changqing Shi, Ming Jiang, Yun-Fei Li
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AssigneeWestern Digital (Fremont), LLC
InventorsLijie Guan, Changqing Shi, Ming Jiang, Yun-Fei Li
Estimating the term…
Methods of forming a write pole are disclosed. A first photomask having a first opening over one of a yoke region and a pole tip region of the write pole is formed over an insulation layer having an insulator material. A first etch process is performed on the insulation layer via the first opening, the first etch process removing the insulator material from a corresponding one of the yoke region and the pole tip region. A second photomask having a second opening over the other one of the yoke region and the pole tip region is formed over the insulation layer. A second etch process is performed on the insulation layer via the second opening, the second etch process removing the insulator material from a corresponding one of the yoke region and the pole tip region.
A method of forming a write pole for a magnetic recording head, the method comprising:
A method of forming a write pole for a magnetic recording head, the method comprising:
Dependencies are inferred from the claim text.