Insitu post atomic layer deposition destruction of active species

A reactor for use in atomic layer deposition, the reactor comprising:

• at least one gas input through which gas enters the reactor;
• a first heater having a first surface configured to support a workpiece, the first heater operative to heat the workpiece inside the reactor to a first temperature suitable for atomic layer deposition;
• at least one surface inside the reactor operative to be heated to a second temperature higher than the first temperature, wherein the second temperature is high enough to substantially destroy that portion of a gas that does not react with the workpiece before the gas is purged from the reactor, wherein the surface is coated with a catalyst that increases the rate of destruction of the portion of the gas that does not react with the workpiece, and wherein the at least one surface is supported by an inner wall of the reactor below the level of the first surface of the first heater, and not in contact with the first heater, and a portion of the at least one surface extends underneath an area of the first surface of the first heater;
• and
• at least one gas output through which gas exits the reactor.